Charlton Heston in 'The Ten Commandments' (1956) - Yes, he plays Moses in this classic Biblical adaptation, but he also voices God, so Heston definitely deserves a place on this list.
Whoopi Goldberg in 'A Little Bit of Heaven' (2011)- 'A Little Bit of Heaven' brings us yet another woman as God. In this movie, God appears to a terminally ill young woman and grants her three wishes.
Vincent Price in 'The Story of Mankind' (1957) - Mr. Scratch tries to persuade a judge that a weapon called "Super H-Bomb," which has the capacity to wipe out all humans, should be detonated.
Harvey Stephens in 'The Omen' (1976) - An adopted orphaned infant turns out to be the personification of evil.
Tim Curry in 'Legend' (1985) - In this movie, we get to see a young Tom Cruise against the Lord of Darkness (played by Tim Curry) in a quest to save his princess.
Jack Nicholson in 'The Witches of Eastwick' (1987) - Nicholson plays Satan in disguise, under the name Daryl Van Horne, who tries to manipulate three women.
Elizabeth Hurley in 'Bedazzled' (2000) - Probably the most attractive Devil in film history, Liz Hurley's character grants a young man seven wishes.
Harvey Keitel in 'Little Nicky' (2000) - Keitel plays the Devil in this movie, where his son, Nicky (Adam Sandler), is sent to Earth in search of his two brothers who escaped Hell.
Peter Fonda in 'Ghost Rider' (2007) - You probably remember Nicolas Cage riding a motorcycle in this movie, but it's Peter Fonda who plays Mephistopheles, aka the Devil.
Tom Waits in 'The Imaginarium of Doctor Parnassus' (2009) - The famous musician plays Mr. Nick (aka the Devil) in this fantasy/adventure movie.